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Researchers from the University of Jena have developed a method called coherence tomography with extreme ultraviolet light (XCT). The technique, which has applications in materials research and data processing, enables the study of the interior structures of semiconductor materials in a nondestructive way.
The imaging method is based on the operational principles of optical coherence tomography (OCT), an established imaging method in areas such as ophthalmology, doctoral candidate Felix Wiesner said. “These devices have been developed to examine the retina of the eye noninvasively, layer by layer, to create three-dimensional images.”
Professor Gerhard Paulus, Ph.D. student Felix Wiesner, and Dr. Silvio Fuchs (from…