Industry News

Jena’s development of compact high-power EUV source wins Hugo Geiger Award

Mar 27, 2023, 12:03 PM by System
https://optics.org/news/14/3/42
Full EUV power at “laboratory scale” achieved by Robert Klas from Friedrich Schiller University.

Leave a comment

Order by

Newest on top Oldest on top
Load more comments
Comment by from